课程号：MI206004

课程名：微纳制造工程

英文课程名：Microfabrication Engineering

开课单位：微电子学院

授课教师：Xiaohong Tang

责任教师：王斌   王利明

学分/学时：1学分/16学时

教师简介：汤小泓，IEEE高级会员，就职于新加坡南洋理工大学。现在为南洋理工大学终身教席副教授。汤教授长期从事半导体微纳米结构、半导体外延和半导体光电器件的研究工作。他在南洋理工大学率先主持建立了金属有机气相外延工艺，成功研制出各类高质量化合半导体材料：半导体量子阱、量子线和量子点等纳米结构、大功率半导体激光阵列。汤教授主讲了多门本科及研究生课程，授课经验丰富。

Prof. Tang Xiaohong is a Senior Member of IEEE and works in Nanyang Technological University (NTU),Singapore. He is now a tenured Associate Professor of the School of Electrical and Electronic Engineering, NTU. Prof.Tang’s researches focus on compound semiconductor nanostructures, semiconductor epitaxy growths and semiconductor optoelectronic devices. He has led to develop the first MOCVD epitaxy growth technology in NTU. His team has successfully grown varies high varies III-V compound semiconductors, semiconductor nanostructures, such as quantum wells, semiconductor nanowires and semiconductor quantum dots. They have also developed high performance semiconductor laser arrays. Prof. Tang is the coordinator of 6 courses, including the course “Microfabrication Engineering”.

课程简介：本课程旨在为学生讲授有关半导体晶圆制造技术与原理、制造系统和操作的基础知识。学生将学习半导体单晶生长技术的基础概念与方法，包括真空技术，热退火工艺等。通过该课程的学习，学生可以深刻了解与掌握广泛应用于微电子、光电子、材料科学等领域的半导体单晶制备方法与技术，为学生日后的科研、工作提供重要的基础。

This course aims to provide students with fundamental knowledge of various semiconductor wafer fabrication technologies, their principles, systems and operations. The students will learn the basic the concepts and operation of semiconductor single crystal growth technology, including vacuum technology, thermal annealing, etc. The knowledge the students learnt in this course will enable them to gain a strong understanding of various technologies of semiconductor, which are widely used but not limited in microelectronics.

先修课程：无